JEOL JBX9500 e-beam lithography
100keV Electron Beam Lithogrpahy; Up to 300mm wafers, 1mm field, 50MHz
Site:
Cornell University
Tool ID:
CNF 0402
Tool Model:
JBX9500FS
Tool Manufacturer:
JEOL
Tool Area:
Lithography and Direct Patterning
Electron Beam
JEOL9xxx