National Nanotechnology Infrastructure Network

National Nanotechnology Infrastructure Network

Serving Nanoscale Science, Engineering & Technology

JEOL JBX9500 e-beam lithography

100keV Electron Beam Lithogrpahy; Up to 300mm wafers, 1mm field, 50MHz

Site: 
Cornell University
Tool ID: 
CNF 0402
Tool Model: 
JBX9500FS
Tool Manufacturer: 
JEOL
Tool Area: 
Lithography and Direct Patterning
Electron Beam
JEOL9xxx