National Nanotechnology Infrastructure Network

National Nanotechnology Infrastructure Network

Serving Nanoscale Science, Engineering & Technology

ALD and Ion Beam Workshop


ALD and Ion Beam Workshop  at UC Santa Barbara, CA

Date: 12th November 2013
Time: 8:00am – 5:00pm (PT)

This event is being organised with our hosts UCSB, and will cover several aspects Atomic Layer Deposition (ALD) and Ion Beam etch and deposition processes and technologies.

Guest speakers from renowned research & manufacturing organisations, speakers from UCSB, and technical experts from Oxford Instruments will all speak on topics from the fundamentals of these technologies, through to User experiences, and hints and tips from Oxford Instruments. The programme will also allow plenty of time for discussion and questions. In addition there will be a technical poster session by Oxford Instruments.

This will be an excellent opportunity for networking between researchers, users and our guest speakers from academia and industry.

  • Programme will include:
  • An introduction to plasma and themal ALD techniques   
  • ALD Hardware developments    
  • An introduction to Ion Beam technology
  • Ion Beam Etch – a users perspective       
  • Ion Beam developments              
  • ALD Process (Metal & Nitride ALD)           
  • ALD – a user’s results     
  • Ask the experts, Q & A & ion beam & ALD process posters

Registration form - To register to attend this workshop please complete your details below

Testimonial from a 2012 Seminar

”This was an excellent workshop, the talks presented very useful information allowing our students and researchers to learn more about Atomic Layer Deposition and plasma processing from the experts. This is a really good way for Oxford Instruments to highlight the expertise of its staff.”

Dr. Vicky Diadiuk, Associate Director, Operations, at MTL


Tue, 11/12/2013 (All day)
This event requires an RSVP: 
UC Santa Barbara, CA