Plasma Processing Workshop by Plasma Therm at UT Austin
The Microelectronics Research Center at UT-Austin will host a Plasma Processing technical workshop presented by PlasmaTherm.talks Non-commercial presentations will include compound semiconductor, dielectric, and deep silicon etching as well as PECVD and high density plasma CVD of silicon based materials. Fundamental and new ideas for endpoint detection and sample thermal budget management will be presented.
Contact Christine Wood at christine.wood@austin.utexas.edu or 512-965-6671
Dates:
Fri, 09/28/2012 (All day)
This event requires an RSVP:
No
Location:
University of Texas, Austin