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National Nanotechnology Infrastructure Network

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Oxford Instruments Plasma Processing Seminar

Plasma Processing Seminar at Cornell


Tuesday and Wednesday,
August 20 and 21, 2013


Oxford Instruments Plasma Technology and the Cornell NanoScale Facility (CNF) will hold a technical seminar addressing the latest research and technologies in plasma etch deposition and growth.

This one-and-a-half day event is being held on Tuesday and Wednesday, the 20th and 21st of August, at Cornell University, in Ithaca, NY, and will include presentations, discussions, a poster session focusing on latest innovations, and a networking lunch.

Speakers are from key international research institutes, who will discuss their research:

Prof. Peter Ashburn, Southampton University, UK
Vincent Genova, Cornell NanoScale Facility, Cornell University
Prof. Axel Scherer, Director, Caltech, CA
*more speakers to be announced

In addition, experts in their field from Oxford Instruments and Cornell University will speak on the latest process and applications developments in a number of plasma processing areas.

Presentations currently include:

ALD Applications
An Overview of Plasma ALD Process
MEMS Process
Dielectric Etching at the Nanoscale
Nanoscale Metal Etching


This seminar is free of charge, registrations must be
submitted [online] in advance to facilitate event planning.
Please register by Monday, August 12th.  Thank you!

Seminar Overview:

Oxford Plasma Processing Seminar at Cornell University
Tuesday and Wednesday, August 20th and 21st, 2013

Tuesday 20th August
Morning Programme
G10 Bio-Technology Building

9:30 - 9:45a, Registration and Coffee*
9:45 - 10:00a, Welcome: CNF and Oxford Instruments
10:00a - 12:15p, Presentations
12:15 - 1:30p, Lunch* (Baum Atrium, Duffield Hall)

Afternoon Programme
G10 Bio-Technology Building

1:30 - 4:30p, Presentations
5:00 - 7:00p, Poster Session and Reception* (Baum Atrium, Duffield Hall)

Wednesday 21st August
Morning Programme
G10 Bio-Technology Building

9:00a - 12:15p, Presentations*
12:15-12:30p, Wrap Up and Close

*  For registered participants, ONLY, we will provide coffee and tea service (regular and decaf) through-out both days of the seminar, and lunch on Tuesday (with vegetarian options). For the Poster Session, there will be hors d'oeurves and an open bar. Please note we will not be providing breakfast foods.

Information for Those Traveling to Ithaca
including overnight accommodation recommendations, directions, and parking information:

Satellite Map of Cornell

If you have questions on the seminar content, please contact: Nancy Crouch [email]

If you have questions on seminar logistics, please contact: Melanie-Claire Mallison [email]


Tue, 08/20/2013 - 9:30am to Wed, 08/21/2013 - 12:30pm
This event requires an RSVP: 
Cornell University - Ithaca, NY