National Nanotechnology Infrastructure Network

National Nanotechnology Infrastructure Network

Serving Nanoscale Science, Engineering & Technology

Anisotropic Etch Simulator for MEMS

IntelliSuite was the first MEMS-specific CAD tool and has been under active development for over 20 years. In this webinar, explore and understand how IntelliEtch, a powerful anisotropic etch simulator, can help MEMS designers and process engineers save time and cost in their etching processes while helping professors teach their students about advanced etching techniques. This webinar will cover: simulation of wet etching for silicon and quartz, etching of high-order planes, experimental validation of the program’s accuracy, simulating composite multi-mask MEMS processes, simulation speed enhancement through GPU-based processing, and discussion of the new features and capabilities available in the latest IntelliEtch release.

Presenter: Joe Johnson, Intellisense

University of Michigan