National Nanotechnology Infrastructure Network

National Nanotechnology Infrastructure Network

Serving Nanoscale Science, Engineering & Technology

How Can IntelliSuite v8.7 Benefit MEMS Research and Teaching

IntelliSuite was the first MEMS-specific CAD tool and has been under development for over 20 years. In this webinar, understand how this industrystandard software can help MEMS designers, process engineers, and professors save time and costs in the development cycle, share their designs with others, and teach students about MEMS. The webinar will cover: process development using virtual fabrication tools, etch recipe development using process simulators, design rule checking and cross-sectioning tools for MEMS layout, design exploration and optimization using behavioral and parametric modeling, recent developments in automated meshing algorithms, discussion of coupled FEM-BEM solvers for MEMS multiphysics analysis, linking MEMS models to EDA tools for MEMS/IC co-development, real-world examples showing how simulation tools can help accelerate the MEMS design cycle and discussion of the new features in the latest IntelliSuite release.

Presenter: Joe Johnson,IntellliSense

University of Michigan