National Nanotechnology Infrastructure Network

National Nanotechnology Infrastructure Network

Serving Nanoscale Science, Engineering & Technology

MEMS Virtual Prototyping for Debugging Your Process Flow

IntelliSuite was the first MEMS-specific CAD tool and has been under active development for over 20 years. This webinar will explore how IntelliFab, a powerful process flow simulation tool, can help MEMS designers and process engineers save valuable time and cost in their processes while helping professors teach their students about optimizing complex process flows. This webinar will cover: building and debugging process flows, working with MEMaterial (MEMS process database) and foundry ready templates, quickly visualizing process flows, exporting photo-realistic renderings for presentations, and discussion of the newfeatures and capabilities available in the latest IntelliFab release.

Presenter: Joe Johnson, Intellisense

University of Michigan