Serving Nanoscale Science, Engineering & Technology
Operation of the HMDS vapor prime oven at Stanford. Several similar tools are abailable at other NNIN facilities.
The National Nanotechnology Infrastructure Network is supported by National Science Foundation Cooperative Agreement EECS-0335765 and by support from the member institutions.
Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.