NNIN - Process Support

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Process Support
Search NNIN Processes

Our process support system is live and working but very incomplete right now. In time, we anticipate our more than 1300 tools will be available here for your review and process flow planning.

Choose single or multiple groups/subgroups to limit your search, or enter no criteria to return the full list.
Some processes are categorized under multiple groups.

ProcessID is a unique number associated with a process. It appears last in the process code numbering scheme of [group.subgroup.processID]. Thus, processcode 1.3.8 indicates that processID 8 can be categorized into the 'Lithography and direct patterning group', under the subgroup 'ebeam lithography'. In this fictional example, processcode 2.4.8 would refer to the same process -- processID 8 -- but would indicate the process can be categorized in a different way.
No processIDs are shown on this screen, but if known, they can be used in the search criteria here.

process group:
process subgroup:


processID:	(integer only)
process name:	(contains)
site:
tool:
tool comment:
characteristics:	(contains)
limitations:	(contains)
comment:	(contains)

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This material is based upon work supported by the National Science Foundation under Grant No. ECS-0335765. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.

© 2004 National Nanotechnology Infrastructure Network, (NNIN)
NNIN is funded by a cooperative agreement with the as a national resource for nanoscience instrumentation.