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Center for Nanotechnology
University of
Washington, Seattle
Expertise: Nanoscale
Science and Technology for Biology and Bio-medical Applications
 The
University of Washington NNIN node (UW-NNIN) has primary responsibilities in
the areas of biological and life sciences, society and ethics (SEI), and, together with University of
Michigan, in connecting the network to the aquatic science community. UW-NNIN
employs a technical staff of 8 and consists of the Nanotech User Facility
(NTUF) and the Washington Technology Center Microfabrication Laboratory. NTUF
occupies over 3,000 sq ft of newly renovated laboratory space equipped with
tools and facilities targeted towards the investigative needs of nanobio users.
These include cell culture, scanning probe microscopies, laser scanning
confocal microscopy, fluorescence microscopy, Raman confocal microscopy,
surface plasmon resonance spectroscopy, and scanning and transmission electron
microscopy. NTUF also provides complementary e-beam lithography, atomic layer
deposition, and soft lithography services for rapid micro- and nanoscale
prototyping. The adjacent Microfabrication Laboratory occupies 15,000 sq ft
(8,000 sq ft of cleanroom space) and provides access to high-tech micro- and
nanofabrication equipment including photolithography, thin-film deposition,
plasma and chemical etching, and characterization
processes. Photolithography is divided into acid/base chemical etching,
and a suite of lithography equipment capable of 1 µm resolution using contact
aligners. Thin-film is dedicated to metal deposition via sputtering or
evaporation; etching of dielectrics and metals is performed via reactive ion
etching. High-temperature deposition equipment includes plasma-enhanced
CVD, low-pressure CVD for silicon nitride and oxides, growth of silicon dioxide
through wet oxidation, and a carbon nanotube reactor. The Microfabrication
Laboratory also houses dip-pen nanolithography and nano-imprinting tools. Well-established
training programs allow users to master tools quickly. UW-NNIN operates
as a cost facility and is available on a 24/7 basis for qualified users from
both academia and industry.
For
Information and Access Contact:
Qiuming Yu, Ph.D.
NTUF Lab Manager
(206) 543-5101
qyu@u.washington.edu
http://depts.washington.edu/ntuf
UW Center for NanoTechnology Educational Activities
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