Center for Nanotechnology
University of Washington, Seattle

Expertise: Nanoscale Science and Technology for Biology and Bio-medical Applications

The University of Washington NNIN node (UW-NNIN) has primary responsibilities in the areas of biological and life sciences, society and ethics  (SEI), and, together with University of Michigan, in connecting the network to the aquatic science community. UW-NNIN employs a technical staff of 8 and consists of the Nanotech User Facility (NTUF) and the Washington Technology Center Microfabrication Laboratory. NTUF occupies over 3,000 sq ft of newly renovated laboratory space equipped with tools and facilities targeted towards the investigative needs of nanobio users. These include cell culture, scanning probe microscopies, laser scanning confocal microscopy, fluorescence microscopy, Raman confocal microscopy, surface plasmon resonance spectroscopy, and scanning and transmission electron microscopy. NTUF also provides complementary e-beam lithography, atomic layer deposition, and soft lithography services for rapid micro- and nanoscale prototyping. The adjacent Microfabrication Laboratory occupies 15,000 sq ft (8,000 sq ft of cleanroom space) and provides access to high-tech micro- and nanofabrication equipment including photolithography, thin-film deposition, plasma and chemical etching, and characterization processes. Photolithography is divided into acid/base chemical etching, and a suite of lithography equipment capable of 1 µm resolution using contact aligners. Thin-film is dedicated to metal deposition via sputtering or evaporation; etching of dielectrics and metals is performed via reactive ion etching.  High-temperature deposition equipment includes plasma-enhanced CVD, low-pressure CVD for silicon nitride and oxides, growth of silicon dioxide through wet oxidation, and a carbon nanotube reactor. The Microfabrication Laboratory also houses dip-pen nanolithography and nano-imprinting tools. Well-established training programs allow users to master tools quickly.  UW-NNIN operates as a cost facility and is available on a 24/7 basis for qualified users from both academia and industry.

 

For Information and Access Contact:

Alec B. Pakhomov PhD., Principal Research Scientist/NTUF Lab Manager
- Schedules training & Initiates new projects -
email: pakhomov@uw.edu

Ph: 206-616-2118

Fx: 206-685-4434
web: http://depts.washington.edu/ntuf  

  UW Center for NanoTechnology Educational Activities