National Nanotechnology Infrastructure Network

National Nanotechnology Infrastructure Network

Serving Nanoscale Science, Engineering & Technology

Stanford University

Stanford Nanofabrication Facility

Stanford University, Stanford, CA

Expertise: A broad range of micro- and nanofabrication tools and techniques.

The Stanford Nanofabrication Facility (SNF) is a state-of-the-art, shared-equipment, open-use resource. This laboratory serves academic, industrial, and governmental researchers across the country and around the globe. The SNF is more than just a lab; it is a vibrant community of researchers.

Our lab members come from a wide variety of disciplines, with research in areas of optics, MEMS, biology, and chemistry, as well as process characterization and fabrication of more traditional electronics devices. We are especially committed to supporting use of micro- and nanofabrication technologies in non-traditional research applications.

SNF is housed in the Paul Allen Center for Integrated Systems building.  The main facility consists of a 10,500 square foot Class 100 cleanroom that is populated with nearly 100 different instruments and fabrication tools.  SNF supports a broad range of micro- and nanofabrication materials and processes.  Details of our equipment and summaries of their capabilities may be found at

Further information about SNF, including procedures for becoming a qualified user of SNF, may be found at

For further information contact:

Mary Tang

SNF Web Site