National Nanotechnology Infrastructure Network

Process Versatility of FEI's Quanta 3D Dual-Beam FIB

Kevin Roberts, Scientist, University of Minnesota
Posted January 2013

The Quanta 200 3D is a Dual-Beam system (fitted with both an E-beam and an Ion Beam) comprised of a tungsten electron column and a Ga ion column that utilizes either high vacuum or environmental SEM (ESEM) technology to section, image, and analyze a wide range of conducting and non-conducting samples. This system offers the capability for...