Process Blogs containing NIL
Nanonex NX-2500 Nanoimprint Lithography Update (Cornell)
Vincent Genova, Process Engineer, CNF Nanoimprint lithography (NIL) has the advantage of high throughput with sub-10nm resolution. NIL is included on the ITRS roadmap for 45nm and below nodes for advanced electronic devices. In addition to electronics, NIL is a benefit to many applications including displays, nanophotonics, biotechnology, and MEMS. The NX-2500 has both thermal imprint (T-NIL) and photocurable imprint (P-NIL)...
Posted Oct. 2012
