National Nanotechnology Infrastructure Network

National Nanotechnology Infrastructure Network

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Process Blogs containing NIL

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Nanonex NX-2500 Nanoimprint Lithography Update (Cornell)


Vincent Genova, Process Engineer, CNF
Posted Oct. 2012

Nanoimprint lithography (NIL) has the advantage of high throughput with sub-10nm resolution.  NIL is included on the ITRS roadmap for 45nm and below nodes for advanced electronic devices.  In addition to electronics, NIL is a benefit to many applications including displays, nanophotonics, biotechnology, and MEMS.

The NX-2500 has both thermal imprint (T-NIL) and photocurable imprint (P-NIL)...

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