National Nanotechnology Infrastructure Network

National Nanotechnology Infrastructure Network

Serving Nanoscale Science, Engineering & Technology

Process Blogs containing SNF

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Wafer Level AlGe Eutectic Bonding for MEMS-Electronic-Photonic Heterogeneous Integration

04.28.13

Niels Quack (1), Sangyoon Han (2), Ming C. Wu (3)
1 : Postdoctoral Fellow at UC Berkeley, 253M Cory Hall, Berkeley, CA, 94720-1770, quack@eecs.berkeley.edu
2 : UC Berkeley, sangyoon@eecs.berkeley.edu, 3 : UC Berkeley, wu@eecs.berkeley.edu

Abstract: An AlGe eutectic wafer level bonding process is presented and...

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Atomic Layer Deposition of SrO at Stanford Nanofabrication Facility

03.11.13

Michelle Rincon and Woo Shik Jung, Stanford Nanofabrication Facility

Our goal at the SNF is to enable users to develop any film they need using our Cambridge Nanotech Savannah (thermal ALD system) and Fiji (plasma-enhanced ALD) systems.  One great example of this is our newly developed SrO deposition process.

The SrO film was developed using the Bis(1,2,4-tritertiarybutylcyclopentadienyl)strontium precursor.  Since this precursor has a low vapor pressure (0.6mmHg at...

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