Stanford Nanofabrication Facility
Stanford University
Stanford, CA

Expertise: A broad range of micro- and nanofabrication tools and techniques.

The Stanford Nanofabrication Facility (SNF) is a state-of-the-art, shared-equipment, open-use resource. This laboratory serves academic, industrial, and governmental researchers across the country and around the globe. The SNF is more than just a lab; it is a vibrant community of researchers.

Our labmembers come from a wide variety of disciplines, with research in areas of optics, MEMS, biology, and chemistry, as well as process characterization and fabrication of more traditional electronics devices. We are especially committed to supporting use of micro- and nanofabrication technologies in non-traditional research applications.

SNF is housed in the Paul Allen Center for Integrated Systems building.  The main facility consists of a 10,500 square foot Class 100 cleanroom that is populated with nearly 100 different instruments and fabrication tools.  SNF supports a broad range of micro- and nanofabrication materials and processes.  Details of our equipment and summaries  of their capabilities may be found at http://snf.stanford.edu/Equipment/EquipByName.html.

In addition the capabilites of the SNF, NNIN users may make use of advanced characterization tools offered by the the Stanford Nanocharacterization Laboratory (SNL).  SNL is housed in the nearby Geballe Laboratory for Advanced Materials and is only a short walk from SNF.  While the details of their capabilities are provided on their web site (http://www.stanford.edu/group/snl), SNL provides high-quality SEM, TEM, and FIB capabilities.

Further information about SNF, including procedures for becoming a qualified user of SNF, may be found at http://snf.stanford.edu.

For further information contact:

John Shott
SNF Associate Directory

shott@snf.stanford.edu